Microstructure and properties of ultrathin amorphous silicon nitride protective coating
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چکیده
منابع مشابه
Doping and electrical properties of amorphous silicon carbon nitride films
Electrical properties and annealing behaviour of undoped and doped amorphous silicon carbon nitride (a-SiC N ) thin films, x y deposited by ion beam sputtering techniques, have been studied. Doping of the a-SiC N thin films with magnesium (Mg), and x y phosphorous (P) was carried out by ion implantation techniques, and subsequent annealing effect on the electrical conductivity (s) and activatio...
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0026-2714/$ see front matter 2011 Elsevier Ltd. A doi:10.1016/j.microrel.2011.09.004 ⇑ Corresponding author at: Institut Femto-ST, U CNRS, 32 avenue de l’observatoire, F-25044 Besançon E-mail address: [email protected] (E. Her The aim of this work is to determine optimal deposition parameters of silicon nitride for optical applications. The authors present the investigation of hydrogena...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2003
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.1615974